ARIOS INC.

MBE

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Our many MBE system are used in a research and production. We produce special design and large-sized system.

Typical specifications

	Pumping : Turbo molecular pump, Ion pump, Crio Pump
	Back pressure : 10-8 Pa or under (With LN2 cooling)
	Target holder : Rotation, temperature control -20 to 800 degree, 1" - 6" wafer
	k-cell x 8